The construction and use of thin film thermocouples for the measurement of surface temperature: Applications to substrate temperature determination and thermal bending of a cantilevered plate during film deposition
- 1 April 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 67 (1) , 163-170
- https://doi.org/10.1016/0040-6090(80)90300-4
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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