Ellipsometric investigations of oxide films on Ga As

Abstract
The optical constants of GaAs substrates have been determined by ellipsometry for λ = 5 461 Å. They are n = 3.923 and k = 0.304. The fundamental equation of ellipsometry was solved for the case of transparent films on GaAs. Investigations on thermally oxidized GaAs revealed that the resulting film has a complex structure, with an accumulation of arsenic at the GaAs-film interface