Micromachined two-dimensional array piezoelectrically actuated transducers
- 16 March 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (11) , 1397-1399
- https://doi.org/10.1063/1.121067
Abstract
This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.Keywords
This publication has 3 references indexed in Scilit:
- Piezoelectrically actuated droplet ejectorReview of Scientific Instruments, 1997
- Vibration Of Circular Membranes In Contact With WaterJournal of Sound and Vibration, 1994
- New Airborne Ultrasonic Transducer with High Output Sound Pressure LevelJapanese Journal of Applied Physics, 1994