CW LASER-INDUCED REACTIONS FOR SILICIDE FORMATION
- 1 January 1980
- book chapter
- Published by Elsevier
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Nucleation-controlled thin-film interactions: Some silicidesApplied Physics Letters, 1979
- Ion-beam-induced silicide formationApplied Physics Letters, 1979
- Dynamics of laser-induced formation of palladium silicideApplied Physics Letters, 1979
- Laser-induced reactions of platinum and other metal films with siliconApplied Physics Letters, 1978
- Formation kinetics and structure of Pd2Si films on SiSolid-State Electronics, 1973
- The growth and transformation of Pd2Si on (111), (110) and (100) SiThin Solid Films, 1973