Analysis of Reactively Ion Plated Titanium-Nitrid Films

• 1 January 1983
• book chapter
• Published by Springer Nature
• p. 177-187
• https://doi.org/10.1007/978-3-7091-3943-1_14

Abstract

Keywords

• CVD
• TOOLS
• PVD
• VAPOR DEPOSITION
• MAIN ADVANTAGE
• HSS COATINGS
• ORIGINAL COATING