Preliminary Results on the Oxidation of GaAs and GaP during Chemical Etching

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (4) , 657
• https://doi.org/10.1149/1.2408135

Abstract

Keywords

• CHEMICAL ETCHING
• GAP DURING CHEMICAL
• PRELIMINARY
• GAAS AND GAP
• OXIDATION OF GAAS