Improving the anticorrosion and mechanical behaviour of PACVD TiN
- 1 September 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 387-393
- https://doi.org/10.1016/0257-8972(95)08371-5
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- The effects of chlorine content on the properties of titanium carbonitride thin film deposited by plasma assisted chemical vapor depositionJournal of Vacuum Science & Technology A, 1991