X-ray reflectivity study of SiO2 on Si

• 1 May 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 8  (3) , 2046-2048
• https://doi.org/10.1116/1.576803

Abstract

Keywords

• PHYSICAL PROPERTIES
• OSCILLATIONS
• DYNAMIC RANGE
• X RAY REFLECTIVITY
• ELECTROMAGNETIC RADIATION
• SURFACE ROUGHNESS
• IONIZING RADIATION
• X RAY DIFFRACTION
• THIN FILM