Analysis of a Ring Cavity Thin-Film Deposition Source
- 1 September 1970
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 7 (5) , 517-527
- https://doi.org/10.1116/1.1315867
Abstract
Equations are derived which allow the prediction of the thickness distribution of thin films deposited from sources possessing vertical sides and axial symmetry. These equations are in the form of three double integrals which must be integrated over a variable region of integration. Some correlation with experiment is also reported.Keywords
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