Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVD
- 1 January 1995
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Polycrystalline silicon films obtained by hot-wire chemical vapour depositionApplied Physics A, 1994
- Investigation of polycrystalline silicon deposition on glass substratesSolar Energy Materials and Solar Cells, 1993
- Hot filament assisted deposition of silicon nitride thin filmsApplied Physics Letters, 1992
- Determination of activation energies for diamond growth by an advanced hot filament chemical vapor deposition methodApplied Physics Letters, 1991