Silicon coatings on copper by chemical vapor deposition in fluidized bed reactors
- 10 December 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 49 (1-3) , 103-109
- https://doi.org/10.1016/0257-8972(91)90039-y
Abstract
No abstract availableKeywords
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