Organosilane Monolayer Resists for Scanning Probe Lithography.

• 1 January 1997
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 10  (4) , 661-666
• https://doi.org/10.2494/photopolymer.10.661

Abstract

Keywords

• PROBE LITHOGRAPHY
• SCANNING PROBE
• ORGANOSILANE MONOLAYER RESISTS