Effect of Kilovolt Electrons on the Etch Rate of Al[sub 2]O[sub 3] and Ta[sub 2]O[sub 5]
- 1 January 1969
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 116 (5) , 668
- https://doi.org/10.1149/1.2412005
Abstract
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