Piezoelectric and Capacitative Microactuators and Devices
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Integrated Piezoelectric and Pyroelectric Devices from Thin Film FerroelectricsMRS Proceedings, 1991
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988
- Complex BIFORE transformElectronics Letters, 1970