Epitaxial LiTaO3 thin film by pulsed metalorganic chemical vapor deposition from a single precursor
- 6 December 1993
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (23) , 3146-3148
- https://doi.org/10.1063/1.110230
Abstract
Epitaxial LiTaO3 thin films were grown on (0001) sapphire in a low pressure chemical vapor deposition reactor of a new design, using lithium tantalum hexa‐t‐butoxide as the precursor. X‐ray diffraction shows that the LiTaO3 c axis is normal to the sapphire surface. The x‐ray pole figure and cross‐section transmission electron microscopy diffraction show that the films were also in‐plane oriented, with sapphire [101̄0] parallel to lithium tantalate [101̄0]. The refractive index of the film compares well with bulk values, over a wide wavelength range.Keywords
This publication has 10 references indexed in Scilit:
- Epitaxial LiTaO3 thin films by pulsed laser depositionApplied Physics Letters, 1993
- MgO epitaxial thin films on (100) GaAs as a substrate for the growth of oriented PbTiO3Applied Physics Letters, 1992
- Highly efficient quasi-phase-matched second-harmonic generation using a first-order periodically domain-inverted LiTaO3 waveguideApplied Physics Letters, 1992
- Preparation of oriented lithium tantalate thin films using molecularly modified tantalum(V) ethoxide and lithium acetateJournal of Materials Science Letters, 1992
- Heteroepitaxial Growth of LiTaO3 Single-Crystal Films by RF Magnetron SputteringJapanese Journal of Applied Physics, 1991
- The growth of ZnSe and other wide-bandgap II-VI semiconductors by MOCVDSemiconductor Science and Technology, 1991
- Second-harmonic generation of blue light in a LiTaO3 waveguideApplied Physics Letters, 1991
- InGaAsP ( lambda =1.3 mu m) strip buried heterostructure lasers grown by MOCVDIEEE Journal of Quantum Electronics, 1991
- A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin filmJournal of Physics E: Scientific Instruments, 1976
- Lithium Tantalate Light ModulatorsJournal of Applied Physics, 1967