The Effect of Hydrogen Ion Bombardment on Fluorocarbon Polymers
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Selective removal of metal atoms in hydrogen reactive ion etchingJournal of Vacuum Science & Technology B, 1986
- Hydrogen Plasma Etching of OrganicsJournal of the Electrochemical Society, 1984
- Effect of x-ray flux on polytetrafluoroethylene in x-ray photoelectron spectroscopyJournal of Vacuum Science and Technology, 1982
- Hydrogen plasma etching of semiconductors and their oxidesJournal of Vacuum Science and Technology, 1982
- Further results on the erosion of carbon materials by hydrogen plasmaJournal of Nuclear Materials, 1980
- Radiation Chemistry of Poly(methacrylates)IBM Journal of Research and Development, 1977
- X-ray photoelectron spectroscopy of fluoropolymersAnalytical Chemistry, 1972
- Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive IonizationThe Journal of Chemical Physics, 1965
- Cross Sections for Dissociative Ionization of Molecules by Electron ImpactThe Journal of Chemical Physics, 1965
- Dissociation and Ionization of Hydrogen in High Frequency DischargesProceedings of the Physical Society, 1962