Current status and problems of SR lithography
- 31 March 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 17 (1) , 123-130
- https://doi.org/10.1016/0167-9317(92)90025-m
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A vertical stepper for synchrotron x-ray lithographyJournal of Vacuum Science & Technology B, 1989
- Ta/SiN-Structure X-Ray Masks for Sub-Half-Micron LSIsJapanese Journal of Applied Physics, 1989
- NTT superconducting storage ring—Super-ALISReview of Scientific Instruments, 1989
- NTT normal-conducting accelerating ringReview of Scientific Instruments, 1989