A practical microgripper by fine alignment, eutectic bonding and SMA actuation
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 755-759
- https://doi.org/10.1016/s0924-4247(97)80052-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988
- Analysis of Bi-Metal ThermostatsJournal of the Optical Society of America, 1925