Inhomogeneous Oxygen Precipitation and Stacking Fault Formation in Czochralski Silicon

• 1 November 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (11) , 2051-2052
• https://doi.org/10.1143/jjap.17.2051

Abstract

Keywords

• INHOMOGENEOUS OXYGEN
• OXYGEN PRECIPITATION
• FAULT FORMATION
• CZOCHRALSKI SILICON
• STACKING FAULT