Tuning forks in silicon
- 13 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Air and gas damping of quartz tuning forksSensors and Actuators, 1983
- Force Sensor Using Double-Ended Tuning Fork Quartz CrystalsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1983