Krypton entrapment in pulse-biased sputter-deposited metals
- 1 November 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 54 (3) , 327-336
- https://doi.org/10.1016/0040-6090(78)90392-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Ion Sorption in the Presence of SputteringProceedings of the Physical Society, 1962
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Mechanism of Inert Gas Cleanup in a Gaseous DischargeJournal of Applied Physics, 1960