Hrem and Nano-Scale Microanalysis of the Titanium-Silicon Interfacial Reaction
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Interfacial reactions on annealing molybdenum-silicon multilayersJournal of Applied Physics, 1989
- A New Ultra-High Resolution TEM, EM-002b, with a Unique Uhr Objective Lens ConfigurationMRS Proceedings, 1989
- The formation of an amorphous silicide by thermal reaction of sputter-deposited Ti and Si layersJournal of Applied Physics, 1988