Characterization of TiNx and ZrNx multilayered structures by Auger electron spectroscopy
- 31 December 1990
- Vol. 40 (1-2) , 81-84
- https://doi.org/10.1016/0042-207x(90)90125-i
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Predicting thin-film stoichiometry in reactive sputteringJournal of Applied Physics, 1988
- Quantitative auger electron analysis of titanium nitridesSurface Science, 1985
- Kinetics of nitride formation on titanium targets during reactive sputteringSurface Science, 1983
- Investigation of Tin films reactively sputtered using a sputter gunThin Solid Films, 1983