Tungsten metal film formed by spin-coating amorphous peroxopolytungstic acid
- 30 October 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (18) , 1923-1925
- https://doi.org/10.1063/1.102332
Abstract
A homogeneous, amorphous peroxopolytungstic acid film can be formed easily with the spin-coating method. The film is found to provide a homogeneous tungsten metal film after reduction with hydrogen at ∼400 °C. Although the electric resistivity (∼450 μΩ cm) is higher than that for the bulk (5.65 μΩ cm), this method has an advantage in addition to spin coatability: tungsten metal films with fine patterns can be easily obtained because the starting material is photosensitive.Keywords
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