Quick Measurement and Digital Data Handling for Langmuir Probes

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Abstract
A quick measurement and data processing system for Langmuir probes was developed based on a digital technique. This system enabled us to avoid the effect of probe contamination and plasma-state variations on probe characteristics. For noise reduction, the system had an averaging function by digital accumulation of data from multiple scanning. A set of personal computer programs which automatically determine the electron temperature and density from probe-characteristic data was also developed. The system was applied to a negative glow plasma, and the plasma parameters were successfully determined.