Possibilities to increase the resolution of photoelectric incremental rotary encoders
- 1 October 2000
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 3 (5-6) , 557-561
- https://doi.org/10.1016/s1369-8001(00)00084-6
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- The LIGA technique and its potential for microsystems-a surveyIEEE Transactions on Industrial Electronics, 1995
- Electrophoretic Photoresist Technology: An Image of the Future—TodayCircuit World, 1989