Abstract
Performances of Fabry-Perot interferometers are directly dependent on the quality of the optical coatings used. A short review of progress achieved in manufacturing techniques of layers obtained by vapour deposition is presented. A systematic comparison between computer simulation of layer formation and experimental results leads to the best possible use of optical control methods for layer growth. Remaining limitations on optical performances (absorption, scattering, instabilities connected with adsorption) are mainly due to microstructure defects of the thin layers.