Materials Science Aspects of Ion Beam Technology

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Abstract
Ion beams can provide the most versatile and sophisticated family of methods for tailoring the surface properties of all classes of material (semiconductors, metals, ceramics, polymers, etc.). Their usefulness is due to the particle energies they carry which are much greater than conventional thermal energies or interatomic bond energies. Consequently, non-equilibrium modifications can be brought about, the results of which are rapidly quenched into place. This paper deals with the application of these methods for the improvement of tribological, optical, electrical, corrosion, and catalytic properties of material surfaces.