New convergence scheme for self-consistent electromechanical analysis of iMEMS

Publisher Website

19 November 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/iedm.1995.499294

Abstract

No abstract available

This publication has 1 reference indexed in Scilit:

FastCap: a multipole accelerated 3-D capacitance extraction program
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1991