Silicon Impurity Distribution as Revealed by Pulsed MOS C-V Measurements

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (1) , 138
• https://doi.org/10.1149/1.2407927

Abstract

Keywords

• PULSED MOS
• IMPURITY DISTRIBUTION
• SILICON IMPURITY
• DISTRIBUTION AS REVEALED
• REVEALED BY PULSED