As/P exchange on InP(001) studied by reflectance anisotropy spectroscopy
- 17 March 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 70 (11) , 1423-1425
- https://doi.org/10.1063/1.118595
Abstract
Reflectance anisotropy spectroscopy (RAS) has been used to investigate the As/P exchange reaction for group V stabilized InP(001) surfaces exposed to As2 and/or P2, under molecular beam epitaxy conditions. By comparing RAS spectra taken before, during, and after As2 exposure it is possible to confirm that the As/P exchange reaction is exactly reversible over a range of temperatures from 420 to 560 °C. Time-resolved RAS measurements of the reaction rate, monitored at an energy of 2.65 eV, indicate that the activation energy for the exchange is 1.23±0.05 eV.Keywords
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