Micromechanics compatible with an 0.8 μm CMOS process
- 30 April 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 593-597
- https://doi.org/10.1016/0924-4247(94)00969-o
Abstract
No abstract availableKeywords
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