Pre‐ and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- 1 February 1981
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 128 (2) , 389-395
- https://doi.org/10.1149/1.2127428
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: