Transmission Electron Microscope Structural Study of Y 2 O 3 Films Grown on Si(111) Substrates by Ultrahigh Vacuum Ionized Cluster Beam
- 1 August 1999
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 146 (8) , 3028-3031
- https://doi.org/10.1149/1.1392046