Technique for fabrication of superconducting microbridges and small Josephson tunnel junctions
- 1 October 1974
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 45 (10) , 4617-4621
- https://doi.org/10.1063/1.1663099
Abstract
A simple, versatile, and inexpensive technique for the fabrication of superconducting microbridges and small Josephson tunnel junctions is described. The technique is based on the use of fiber masks for the production of precisely controlled substrate channels and yields device dimensions of 1 μm or less.This publication has 27 references indexed in Scilit:
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