Source of a dense metal plasma
- 1 May 1998
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 7 (2) , 141-148
- https://doi.org/10.1088/0963-0252/7/2/008
Abstract
This paper presents results of experimental investigation of a low-threshold slipping surface discharge as a pulsed source of a dense metal plasma. The density of the plasma was measured by application of Langmuir probes and a microwave interferometer. Mass and energy ion spectra were determined using the ion electrostatic and magnetic analyser. Preliminary results concerning a new metal plasma source application for TiN thin-film deposition are discussed.Keywords
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