The Development of Alignment Techniques for the Fabrication of Microelectric Devices
- 1 April 1969
- journal article
- research article
- Published by SAGE Publications in Human Factors: The Journal of the Human Factors and Ergonomics Society
- Vol. 11 (2) , 189-196
- https://doi.org/10.1177/001872086901100213
Abstract
Alternative visual systems for aligning successive circuit patterns in the fabrication of microelectronic devices were developed and evaluated. The experimental evaluation was conducted under both laboratory and production conditions. The study resulted in an optimal alignment mark system in terms of both alignment accuracy and speed.Keywords
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