Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure

• 1 July 1995
• journal article
• Published by Trans Tech Publications, Ltd. in Solid State Phenomena
• Vol. 44-46, 195-226
• https://doi.org/10.4028/www.scientific.net/ssp.44-46.195

Abstract

Keywords

• DENSITY DETERMINATION
• ELLIPSOMETRIC DATA INTERPRETATION
• INITIAL TRANSIENT STAGE OF DISCHARGE
• KINETIC ELLIPSOMETRY
• LASER LIGHT SCATTERING
• PARTICLE FORMATION
• PROCESS CONTROL
• SOLAR CELL OPTIMISATION
• SPECTROSCOPIC ELLIPSOMETRY (SE)
• TETRAHEDRON MODEL