Mechanisms of Al film growth by ultraviolet laser photolysis of trimethylaluminum

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 3146-3152
• https://doi.org/10.1116/1.573644

Abstract

Keywords

• AL FILM
• ULTRAVIOLET LASER
• LASER PHOTOLYSIS
• TRIMETHYLALUMINUM
• FILM GROWTH
• MECHANISMS OF AL