Characterization of ion-implanted Si by electronic and structural data

• 15 May 1983
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research
• Vol. 209-210, 447-452
• https://doi.org/10.1016/0167-5087(83)90837-2

Abstract

Keywords

• ION IMPLANTED
• STRUCTURAL
• DOUBLE
• PARTLY
• 28SI
• 121SB
• 75AS