Holographic interference lithography for integrated optics
- 1 October 1978
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 25 (10) , 1193-1200
- https://doi.org/10.1109/t-ed.1978.19251
Abstract
In this paper, some of our recent work in the use of holographic interference lithography and various material removal techniques to corrugate thin-film optical waveguides are reviewed. The specific applications of these periodic thin-film devices in the distributed feedback and distributed Bragg reflector semiconductor laser, and as output grating couplers, are described. Recent results in the use and fabrication of chirped and curved-line gratings are also summarized.Keywords
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