Control of Second Order Temperature Coefficient of SAW Propagating in Thin Film Layers
- 1 January 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (S1)
- https://doi.org/10.7567/jjaps.31s1.198
Abstract
This study proposes the control method of the 1st- and 2nd-order temperature coefficients of two-layer substrate composed of ZnO and Ta2O5 thin films which have the 2nd-order temperature coefficients of delay time with the signs opposite to each other. As a result, a stable SAW substrate of [Ta2O5/ZnO/Fused quartz] showing the 3rd-order characteristics was developed.Keywords
This publication has 0 references indexed in Scilit: