A New Fabrication Process Of A Planar Coil Using Photosensitive Polyimide And Electroplating
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 268-271
- https://doi.org/10.1109/sensor.1995.721797
Abstract
This paper describes a fabrication process of a plannar coil operating with high electrical current density over 1000A/mml. The coil is achieved by a combination of techniques such as platinum nuclei deposition by sputtering, photosensitive polyimide lithography and both electroless- and electro-plating. An electromagnetic motor is assembled by combining the planar coil and 25 /spl mu/ m thick sputtered NdFeB magnet. This motor is driven 25000r/min at 0. 1A.Keywords
This publication has 1 reference indexed in Scilit:
- Onset of electrical conduction in Pt and Ni filmsJournal of Applied Physics, 1994