Interference structure in optical scattering from oxide/metal interfaces
- 1 July 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 5 (4) , 1661-1665
- https://doi.org/10.1116/1.574542
Abstract
Interference in the optical reflectance from oxide coated metals has been studied. The variation of the diffuse component exhibits a variation which is oppositely phased to the interference structure in the specular reflectance. The scattering originates from roughness which is created by the growth of the oxide. The behavior has been observed for the bilayers Al2O3/Al, Cu2O/Cu, TiO2/Ti, and SiO2/Si. The variation inside the oxide layer of the time average of the squared electric field of the light wave has been calculated. It was found that the diffuse reflectance scales closely with the intensity at the oxide/metal interface, both as a function of wavelength and oxide thickness.Keywords
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