Minority Carrier Lifetime in Furnace and E‐Beam Annealed CZ Silicon

• 1 May 1987
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 134  (5) , 1239-1243
• https://doi.org/10.1149/1.2100649

Abstract

Keywords

• HEAT TREATMENT
• IRON
• THERMAL DIFFUSION
• CRYSTAL GROWTH
• ELECTRON BEAM
• CRYSTAL STRUCTURE