Formation of an atomic hydrogen beam by a hot capillary
- 15 October 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 84 (8) , 4065-4070
- https://doi.org/10.1063/1.368619
Abstract
A beam of atomic hydrogen is produced by passing hydrogen gas through a tungsten capillary heated to 2600 K by electron impact. By means of a differentially pumped quadrupole mass analyzer the angular distribution of the atomic hydrogen is measured for different hydrogen feed pressures. The angular distribution is considerably more peaked than a cosine distribution and is narrower the lower the feed pressure is. Based on the theory of beam formation by molecular flow a simple analytical model is developed which assumes a spatially limited transparent flow at the end of the capillary. The measured angular distribution can be described by the model using the length of transparent flow as the only fitting parameter.This publication has 20 references indexed in Scilit:
- The Role of Hydrogen in UHV Growth of III-V SemiconductorsMaterials Science Forum, 1993
- Low-Temperature Cleaning of GaAs Substrate by Atomic Hydrogen IrradiationJapanese Journal of Applied Physics, 1991
- The trapping of thermal atomic hydrogen on pyrolytic graphiteJournal of Nuclear Materials, 1980
- Reactions of modulated molecular beams with pyrolytic graphite. III. HydrogenThe Journal of Chemical Physics, 1975
- Solution of Clausing’s Integral Equation for Molecular FlowJournal of Vacuum Science and Technology, 1967
- Applications of an Approximation to Molecular Flow in Cylindrical TubesJournal of Vacuum Science and Technology, 1967
- Collisions of Electrons with Hydrogen Atoms. I. IonizationPhysical Review B, 1958
- A new determination of the emissivity of tungsten ribbonPhysica, 1954
- Fine Structure of the Hydrogen Atom. Part IPhysical Review B, 1950
- Über die Strömung sehr verdünnter Gase durch Röhren von beliebiger LängeAnnalen der Physik, 1932