X-ray irradiation effects on a microwave-plasma chemical vapor deposition diamond membrane

Abstract
Diamond membrane masks, fabricated using microwave-plasma chemical vapor deposition, have been evaluated for their dimensional stability as well as other principal characteristics, during 15-MJ/cm3 x-ray irradiation within a vacuum. After x-ray irradiation, intensity of the diamond Raman band at 1332 cm−1 increased to 150% of that unirradiated membrane. Spin density in the diamond increased up to 1.5×1019 spins/g; two times higher than that before irradiation. Despite these effects, in-plane distortion due to x-ray irradiation of the diamond membrane on a half-area of 25-mm square was extremely small (<0.08 μm). Optical transparency of the membrane increased by 4.5%–6.1% at 633 nm due to x-ray irradiation.

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