Interactions of excimer lasers with polymers
- 1 January 1987
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 160 (1) , 698-702
- https://doi.org/10.1063/1.36803
Abstract
Interactions of high photon energy (hν≳5 eV) radiation from an excimer laser with polymeric materials has been studied. Photo‐etching rates at both 193 nm and 248 nm were measured. These results, considered together with our recent measurements of the VUV optical properties of these polymers, give new insights into the mechanisms of the ablative photo‐etching process.Keywords
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