Amorphous Si-F-H solar cells prepared by dc glow discharge
- 1 April 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 36 (7) , 599-601
- https://doi.org/10.1063/1.91561
Abstract
Amorphous Si‐F‐H films were prepared by dc glow discharge in an atmosphere of SiF4 + H2. Optical and electrical measurements have been performed to evaluate the film quality. The photoconductivity of amorphous Si‐F‐H solar cell showed the efficiency of 1.3% under simulated AM1, 100‐mW/cm2 insulation.Keywords
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