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Hot carrier aging in two level metal processing
Home
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Hot carrier aging in two level metal processing
Hot carrier aging in two level metal processing
MC
M.-L. Chen
M.-L. Chen
CL
C.-W. Leung
C.-W. Leung
WC
W.T. Cochran
W.T. Cochran
SJ
S. Jain
S. Jain
HH
H.P.W. Hey
H.P.W. Hey
HC
H. Chew
H. Chew
CD
C. Dziuba
C. Dziuba
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1 January 1987
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
55-58
https://doi.org/10.1109/iedm.1987.191346
Abstract
No abstract available
Cited
Cited by 18 articles
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